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Managing magnetic field interference on electron microscopes in the semiconductor industry

14 November 2019

Electron microscopes are sensitive to interference from the environment, often arising from magnetic fields or vibrations.

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Active Solution Company Ltd. provides Spicer Consulting’s magnetic field cancelling systems to companies working with electron microscopes in the Korean semiconductor industry – for TEM, SEM and FIB platforms – to overcome the problems associated with interference.

Advancements in semiconductor manufacturing have made production of tiny components on a nanometre scale more practical than ever before. Electron microscopy – such as TEM, SEM and FIB-SEM – is a vital quality control tool in the manufacture of these semiconductors, used to structurally analyse devices for any problems. However, image quality is commonly affected by external factors, and can make it challenging to identify faults. Active Solution Company Ltd. supplies Spicer’s magnetic field cancelling systems across Korea, as the company’s President, Jong Hwa Hur, explained: “When a customer is experiencing technical issues with their electron microscope, I visit their site and conduct a survey to measure and analyse for any interference and vibrations, from which I can identify the causes and propose solutions. There are two major products that we provide to the semiconductor industry to overcome electron microscopy problems: magnetic field cancelling systems, and active vibration isolation tables.” 

“Magnetic field interference is normally caused by a 60Hz frequency, commonly present from the abundance of different machinery in these manufacturing facilities. Additionally, the newest semi-conductor factories often feature monorail systems that have been installed in the ceilings to transport components such as silicon wafers between stations for automatic loading and processing. These systems are frequently overlooked but can cause image interference if they are located too close to microscopy rooms.” 

“I’ve been in the semiconductor industry since 1985 and came across Spicer when I was first looking for a solution to magnetic field interference; the relationship has developed ever since. Spicer is highly reputable and its magnetic field cancelling systems – the SC22, SC24 and SC26 – are very intuitive to use, requiring minimal training which can easily be conducted over email. All of my customers have been extremely satisfied with the Spicer products and how they resolve image distortion issues, as well as the additional features – such as the real-time monitoring and auto-reset functions – the systems are excellent,” concluded Jong Hwa. 

For more information on Spicer’s magnetic field cancelling systems, visit https://www.spicerconsulting.com/products.






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