This website uses cookies primarily for visitor analytics. Certain pages will ask you to fill in contact details to receive additional information. On these pages you have the option of having the site log your details for future visits. Indicating you want the site to remember your details will place a cookie on your device. To view our full cookie policy, please click here. You can also view it at any time by going to our Contact Us page.

New process replaces traditional ceramic surface roughening techniques

15 October 2008

Morgan Technical Ceramics has introduced a technology that can significantly improve process residue adhesion, decrease process-related defects and increase yields during the manufacturing of integrated circuits. The technology, Sharkskin™, replaces traditional methods of roughening ceramic surfaces, such as grit blasting or twin-wire arc sprays.

Sharkskin involves the highly controlled texturing of the surface of ceramic components. This texturing does not contaminate or destroy the integrity of the surface of the part as grit blasting does and, unlike arc sprays, is an integral and indistinguishable part of the ceramic surface. In addition, traditional technologies have reached their adhesion limits, rendering them ineffective for devices smaller than 65 nm.

Sharkskin is a technological advancement that increases the adhesion of high-stress films to ceramic components. At roughnesses of up to 1200 µ” Ra, a two-fold adhesion improvement over twin wire arc spray and plasma spray ceramic films has been demonstrated. The increased adhesion can prevent process residues on chamber components from flaking off onto the wafer.

Future use for this technology is anticipated in solar, medical and laser applications where high adhesion properties are required.


Contact Details and Archive...

Print this page | E-mail this page

Igus - Tech Up, Costs Down