Miniature hexapod for vacuum applications
21 March 2011
PI (Physik Instrumente) has released a new miniature hexapod for vacuum applications. A non-vacuum version is also available. The new M-811.STV miniature vacuum-compatible hexapod measures only 130mm in diameter and 115mm in height, and provides precision motion in all six degrees of freedom.
Because of its small size, the M-811.STV is easily integrated into vacuum chambers. It is versatile and easy to use – the user can randomly set the centre of rotation by a simple software command. Features include:
Small but High Load Capacity: 5kg
High Precision: Actuator Resolution 0.04µm, Repeatability : ±0.5µm
Versatile motion: six degrees of freedom + randomized centre of rotation
Velocity to 10mm/s
XYZ-travel: 35/35/13mm; rotations: XYZ: 20°/20°/40°
Digital controller and software included
Like all PI parallel kinematic hexapod positioners, the miniature vacuum hexapod comes bundled with software and digital controller with high-speed Ethernet connectivity. Programming and controlling the hexapod is simple and straightforward, as all positions are conveniently given in Cartesian coordinates (XYZ, Theta X, Theta Y, Theta Z).
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