MEMS capacitive accelerometers offer precision, sensitivity and low noise
22 June 2011
Kistler's new single-axis MEMS capacitive accelerometers make use of the company's K-Beam technology to deliver precision, sensitivity and low noise characteristics for a range of automotive, aerospace, OEM, R&D and general laboratory test applications. Type 8315A series comprises six models with measurement ranges from ±2g to ±200g and a frequency response of zero to 1,000Hz (5%), all housed in a compact package.
The MEMS variable capacitance sensing element consists of a small inertial mass located between two parallel plates. Deflection of the inertial mass under acceleration causes a proportional change in the capacitance of the sensing element. An integrated analogue signal conditioner converts this change to a proportional voltage output. The excellent thermal stability of the MEMS construction provides reliable performance within the wide operating temperature range of -55 to +125C.
Three housings are available: one lightweight, environmentally sealed, hard anodized with integral ground isolation and two welded titanium housings with either an industry standard 4-pin connector or a Teflon coated cable.