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Direct-drive Z-axis nanopositioners for demanding applications

18 May 2013

erotech’s ANT-L-Z crossed-roller, Z-axis, nanopositioning stages are offered in two models (ANT95-L-Z and ANT130-L-Z) and two accuracy grades.

ANT-L-Z stages utilise advanced direct-drive technology pioneered by Aerotech to achieve the high-precision positioning demanded by disk-drive fabrication, fibre alignment, optical delay element actuation, sensor testing and scanning processes - all or which require smooth and precise motion.

ANT-L-Z stages use a nearly frictionless counterbalance mechanism to maintain performance levels while minimising motor heating. The counterbalance is user-adjustable from 0 to 10kg, depending on stage model.

The ANT-L-Z family has universal mounting and tabletop patterns that allow easy system integration. The entire ANT nanopositioner family of linear, rotary, lift, Z-axis and goniometers can be combined for flexible system designs and multi-axis configurations.

The ANT-L-Z stage is capable of a 2nm minimum incremental step size. The in-position stability of less than 2nm is assisted by high-quality, anti-creep, crossed-roller bearings.

Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.


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