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Z-axis piezo nanopositioners for extreme precision applications

29 May 2015

Aerotech QNP-Z series piezo nanopositioning stages join Aerotech’s growing piezo stage family that includes the QNP-L linear and QNP-XY stages.

The QNP-Z series provides the resolution, linearity, repeatability, and high dynamics required for the most demanding applications from microscopy to optics alignment. With resolution to 0.15nm, linearity to 0.007 percent, and repeatability to 1nm, nanometer-level precision is assured.

With high dynamics (resonant frequency and stiffness) users can achieve higher throughput in exacting processes. A variety of travels (100µm to 600µm), feedback options, and vacuum versions add to the exceptional versatility of this stage series.

All QNP piezo stages offer optional closed-loop feedback using a novel capacitive sensor design for sub-nanometre resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly, enabling superior accuracy and repeatability.

When coupled with Aerotech’s Q-series controllers and drives, QNP piezo stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter), and high-positioning bandwidth.

Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times.


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