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High performance open-frame, XY linear-motor stage

21 June 2015

Aerotech’s PlanarDLA integrated, open-frame stages offer high dynamic and exceptional geometric performance in a low-profile package.

The PlanarDLA XY design is optimised for applications where straightness and flatness of motion are critical. High-precision roller bearings, precision-machined surfaces, and noncontact direct-drive linear motors driving through the axes’ center-of-stiffness result in a positioning stage with straightness to ±0.5µm and flatness to ±1.25µm.

PlanarDLA achieves high-throughput, high-accuracy processing with 2m/s velocities and 2g acceleration. At its heart is Aerotech’s proprietary direct-drive technology, which gives superior performance compared with that of screw-based and linear motor designs.

The stages are available with one or two motors per axis; with two motors, the resulting drive force acts through the centres of friction and stiffness for superior geometric performance and accuracy, while one motor per axis is the economical choice if high-throughput and the strictest positioning performance is not required.

Several options are available for additional servo axes, air/vacuum lines for vacuum chucks, or other process pneumatics. PlanarDLA is available in three positioning performance options.


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