Novel air bearing lift stage offers a repeatability of 10nm
03 March 2011
Now available from Micromech is the Alio NANO Z air bearing lift stage featuring 'TRUE NANO' positioning. The design virtually eliminates pitch, yaw and roll over the unit's full 24mm travel range, with better than 90nm of repeatability in the standard unit. Optional 'extreme precision' Nano Z will deliver 10nm of repeatability and an accuracy better than 50nm.
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