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New positioning stage offers high precision over 500mm travel range

08 June 2014

For precise positioning tasks in precision fabrication and automation, Physik Instrumente now offers the M-417 stage with a repeatability of 0.5µm over a 500mm travel range.

The M-417 drive comprises an efficient ActiveDrive dc motor with integrated 24V amplifier turning a ball screw. The stage achieves a velocity of 100mm/s and is designed for high duty cycles.

The recirculating ball bearings allow for a very high guiding accuracy of 100µrad over the entire travel range.

An incremental, motor-shaft-mounted rotary encoder controls the position with a unidirectional repeatability of 0.5µm.

The M-417 stage is 120mm wide and 56mm high. Its stress-relieved aluminum base ensures high stability.

By eliminating power losses between the amplifier and motor, the ActiveDrive System is particularly efficient. The amplifier is integrated in the motor case, so no external linear amplifier is needed. EMC performace is improved by having the amplifier and motor mounted together in a single shielded case.


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