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Non-ITAR MEMS accelerometers for high-amplitude shock applications

15 March 2015

PCB Piezotronics has introduced non-ITAR controlled MEMS high-amplitude dc response acceleration sensors.

The 3501 (single-axis) and 3503 (tri-axis) accelerometers are capable of measuring long duration transient motion as well as responding to and surviving extremely fast rise times typical of high-g shock events.

Both sensors are available with ±20,000 and ±60,000g peak measurement ranges making them able to fulfil the most demanding aerospace, industrial and commercial application requirements. There are both titanium housing with integral cable packages and OEM configurations offered to cover a variety of installation requirements including surface mount, wire bond and flip chip technologies.

Characteristics include wide band frequency response, no zero-shift, damping to reduce resonance amplification, low transverse sensitivity, excellent amplitude linearity and low power consumption. Mechanical over-range stops are designed to improve survivability.

Using deep reactive ion etching (DRIE) equipment and techniques, PCB’s 3501 and 3503 series accelerometers are micromachined in-house from extremely strong single crystal silicon and represent the industry’s smallest, most accurate and durable accelerometers.

The tiny MEMS elements measure just 2.5 x 1.7 x 0.9mm including a seismic mass, protective over-range stops and a full-active piezoresistive Wheatstone bridge.

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